JPH0325402Y2 - - Google Patents

Info

Publication number
JPH0325402Y2
JPH0325402Y2 JP1985135649U JP13564985U JPH0325402Y2 JP H0325402 Y2 JPH0325402 Y2 JP H0325402Y2 JP 1985135649 U JP1985135649 U JP 1985135649U JP 13564985 U JP13564985 U JP 13564985U JP H0325402 Y2 JPH0325402 Y2 JP H0325402Y2
Authority
JP
Japan
Prior art keywords
ring
substrate
block body
shaped
substrate holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985135649U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6244433U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985135649U priority Critical patent/JPH0325402Y2/ja
Publication of JPS6244433U publication Critical patent/JPS6244433U/ja
Application granted granted Critical
Publication of JPH0325402Y2 publication Critical patent/JPH0325402Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1985135649U 1985-09-06 1985-09-06 Expired JPH0325402Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985135649U JPH0325402Y2 (en]) 1985-09-06 1985-09-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985135649U JPH0325402Y2 (en]) 1985-09-06 1985-09-06

Publications (2)

Publication Number Publication Date
JPS6244433U JPS6244433U (en]) 1987-03-17
JPH0325402Y2 true JPH0325402Y2 (en]) 1991-06-03

Family

ID=31038036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985135649U Expired JPH0325402Y2 (en]) 1985-09-06 1985-09-06

Country Status (1)

Country Link
JP (1) JPH0325402Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60112691A (ja) * 1983-11-18 1985-06-19 Anelva Corp 分子線エピタキシャル成長装置用の基板保持装置

Also Published As

Publication number Publication date
JPS6244433U (en]) 1987-03-17

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